New Generation of On-Wafer Microwave Probe Station for Precision GSG Probing

Archive ouverte : Communication dans un congrès

Mokhtari, Cerine | Sebbache, Mohamed | Lenoir, Clément | Boyaval, Christophe | Avramovic, Vanessa | Dambrine, Gilles | Haddadi, Kamel

Edité par HAL CCSD

International audience. Accurate characterization of emergent RF extreme impedance micro-and nanoelectronic devices requires novel probing techniques to ensure the probe-to-pad contact repeatability. In this effort, a new generation of nanorobotics on-wafer probing station is developed. Residual calibration error terms related to probe-to-device approach / retract are quantified in the frequency range 50 MHz – 50 GHz. These residual error terms are propagated to determine the overall measurement uncertainty on the determination of extreme complex impedances. In particular, preliminary results considering capacitance value of 1 fF at 10 GHz demonstrate error around 17% versus 80% using a conventional probe station.

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