Optimization of high frequency 45 degrees acoustic mirrors for lab on chip applications

Archive ouverte : Communication dans un congrès

Li, Sizhe | Carlier, Julien | Lefebvre, Fabrice | Campistron, Pierre | Debavelaere-Callens, Dorothée | Nassar, Georges | Nongaillard, Bertrand

Edité par HAL CCSD ; ELSEVIER SCIENCE BV

International audience. Ultra high frequency (similar to 1GHz) ultrasonic bulk acoustic waves (BAW) characterization has been already integrated in a lab-on-a-chip silicon platform. The acoustic wave guided in three dimensions (3D) was achieved via 45 degrees mirrors in a silicon wafer and applied for the characterization of chemical solution and fluids actuation in micro-channel. The main problem is that strong conversion mode occurs at the silicon-air interface with the incidence angle of 45 degrees. To avoid conversion mode we need to optimize the reflection on the 45 degrees mirrors in order to maximize the acoustic energy of the longitudinal wave and reduce signal to noise ratio. We demonstrated that longitudinal wave transmission is efficiently strengthened using gold coating (average gain factor of 8 compared to reference case without mirror coating). The experimental validation of the losses improvement is achieved using S-21 scattering parameter in a transmission acoustic integrated system. (C) 2015 The Authors. Published by Elsevier B.V.

Consulter en ligne

Suggestions

Du même auteur

Modeling and Prediction of the Dynamic Viscosity of Nanofluids by a Homogen...

Archive ouverte: Article de revue

Zaaroura, Ibrahim | 2021-08

International audience. Nanofluids are an innovative technology that can be used to improve the efficiency of heat transfer in systems such as coolers. Thermal system design requires access to all the physical prope...

Polydimethylsiloxane micro-channels application for the study of dynamic we...

Archive ouverte: Communication dans un congrès

Salhab, Abbas | 2021-04-12

ORAL. International audience. Efficient cleaning of contaminations in the semiconductor industry is a determining factor in ensuring the good quality of the electronics products. We present here the dynamic wetting ...

Analysis of Wetting Transition and Pattern Collapse During the Drying Proce...

Archive ouverte: Communication dans un congrès

Salhab, Abbas | 2022-04-11

International audience. Removing contaminants from silicon wafers surface is an important part in the semiconductors industry. Thus through wet cleaning processes, after each operation (lithography, etching, etc…), ...

Du même sujet

Major Improvement in the Cycling Ability of Pseudocapacitive Vanadium Nitri...

Archive ouverte: Article de revue

Jrondi, Aiman | 2023

International audience. Vanadium nitride film made using a thin film deposition technique is a promising electrode material for micro-supercapacitor applications owing to its high electrical conductivity and high vo...

Phototunable chip-scale topological photonics: 160 Gbps waveguide and demul...

Archive ouverte: Article de revue

Kumar, Abhishek | 2022-12

The authors declare that all the data supporting the findings of thisstudy are openly available in NTU research data repository DR-NTU athttps://doi.org/10.21979/N9/5FK01V.. International audience. The revolutionary...

GDR HOWDI 2022 Meeting : GAP(111)B-SE Surface for TMD epitaxial growth

Archive ouverte: Poster de conférence

Chapuis, Niels | 2022-05-09

International audience. Over the past few years, 2D-Transition Metal Dichalcogenides (TMDs) have revealed great potential for optoelectronics and nanoelectronics devices, thanks to their exceptional properties, not ...

Tunable Topological Acoustic Tamm States in Comblike Structures Based on Ba...

Archive ouverte: Article de revue

Khattou, Soufyane | 2022-12

International audience. We investigate the existence of acoustic Tamm states at the interface between two one-dimensional (1D) comblike phononic crystals (PnCs) based on slender tubes and discuss their topological o...

[Review] Emerging topics in nanophononics and elastic, acoustic, and mechan...

Archive ouverte: Article de revue

Krushynska, Anastasiia | 2023

International audience. This broad review summarizes recent advances and “hot” research topics in nanophononics and elastic, acoustic, and mechanical metamaterials based on results presented by the authors at the EU...

Assessment of Large Critical Electric Field in Ultra-wide Bandgap p- type S...

Archive ouverte: Article de revue

Chi, Zeyu | 2023

International audience. The spinel Zinc Gallate ZnGa2O4 stands out among the emerging ultra-wide bandgap (~5eV) semiconductors as the ternary complex oxide with the widest gap where bipolar conductivity (electrons a...

Chargement des enrichissements...