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Thin film synthesis and micro patterning of lead free piezoelectric ceramic for composite pMUT applications
Archive ouverte : Communication dans un congrès
Edité par HAL CCSD
International audience
- Sujets
- [SPI]Engineering Sciences [physics]
- [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci]
- [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
- [SPI.MAT]Engineering Sciences [physics]/Materials
- [SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph]