High quality factor Hybrid SAW/BAW resonators

Archive ouverte : Communication dans un congrès

Barsoum, S. | Hellion, C. | Vermande, E. | Quemper, J.M. | Bousquet, M. | Reinhardt, A. | Laroche, T. | Ballandras, S. | Dubus, Bertrand

Edité par HAL CCSD ; IEEE

Oral presentation in Session - Surface Acoustic Wave Devices. International audience. We report hybrid SAW/BAW resonators based on arrays of AlN/Mo transducers located atop a silicon substrate. Thanks to an optimized fabrication process, these devices exhibit quality factors up to 3,900 and 1,700 respectively for the pseudo-SAW and pseudo-BAW modes, at frequencies close to 600 MHz and 2.9 GHz.

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