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Development of backing piezoelectric micromachined ultrasonic transducer (B-PMUT) 2D array

Archive ouverte : Communication dans un congrès

Wang, Xu-Bo | Ma, You-Cao | He, Le-Ming | Wang, Yan | Xu, Wei-Jiang | Riaud, Antoine | Ren, Jun-Yan | Zhou, Jia

Edité par HAL CCSD ; IEEE

International audience. To improve the problem of narrow bandwidth and large crosstalk in high-frequency PMUT array, a PMUT device with a damping backing structure (B-PMUT) is proposed and realized. The device is a two-dimensional array of 8×16 elements with an element pitch of 75 µm. The results show that the bandwidth of the device with backing is more than doubled (63%) to that of without backing. The crosstalk level between two neighboring elements decreased from −13.4 dB to −17 dB.

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