Second-order sound field during megasonic cleaning of patterned silicon wafers: Application to ridges and trenches

0 avis

Second-order sound field during megasonic cleaning of patterned silicon wafers: Application to ridges and trenches

Archive ouverte : Article de revue

Vasseur, Jerome O. | Deymier, P. | Vasseur, J. | Khelif, A. | Raghavan, S.

Edité par HAL CCSD ; American Institute of Physics

International audience

Langue: Anglais

Date de publication: 2001-10-15

Source: ISSN: 0021-8979

Consulter en ligne

Consulter le document

Suggestions

Du même auteur

Periodic Structures, Irreducible Brillouin Zone, Dispersion Relations and t...

Archive ouverte: Type de document indéfini

Vasseur, Jerome O. | 2021-11-04

International audience. The Plane Wave Expansion (PWE) method allows the calculation of dispersion curves, i.e., the relation linking the frequency to the wave number for any propagating mode of periodic structures ...

Effect of curvature on interfacial segregation: Electronic contribution to ...

Archive ouverte: Article de revue

Vasseur, Jerome O. | 1994-06

International audience

Concurrent multiscale model of an atomic crystal coupled with elastic conti...

Archive ouverte: Article de revue

Deymier, P. | 2002-10

International audience. A methodology based on a Green’s function formalism, which enables the coupling between atomic and continuous systems, is employed to evaluate the dynamical properties of concurrent elastic m...

Du même sujet

Reading History of Science as a Physics and Mathematics Framework for Newto...

Archive ouverte: Communication dans un congrès

Pisano, Raffaele | 2017-04-19

International audience

On Mechanics and Thermodynamics Analogies in History of Physics-Mathematics...

Archive ouverte: Communication dans un congrès

Pisano, Raffaele | 2017-05-12

International audience

Major Improvement in the Cycling Ability of Pseudocapacitive Vanadium Nitri...

Archive ouverte: Article de revue

Jrondi, Aiman | 2023

International audience. Vanadium nitride film made using a thin film deposition technique is a promising electrode material for micro-supercapacitor applications owing to its high electrical conductivity and high vo...

Phototunable chip-scale topological photonics: 160 Gbps waveguide and demul...

Archive ouverte: Article de revue

Kumar, Abhishek | 2022-12

The authors declare that all the data supporting the findings of thisstudy are openly available in NTU research data repository DR-NTU athttps://doi.org/10.21979/N9/5FK01V.. International audience. The revolutionary...

GDR HOWDI 2022 Meeting : GAP(111)B-SE Surface for TMD epitaxial growth

Archive ouverte: Poster de conférence

Chapuis, Niels | 2022-05-09

International audience. Over the past few years, 2D-Transition Metal Dichalcogenides (TMDs) have revealed great potential for optoelectronics and nanoelectronics devices, thanks to their exceptional properties, not ...

Tunable Topological Acoustic Tamm States in Comblike Structures Based on Ba...

Archive ouverte: Article de revue

Khattou, Soufyane | 2022-12

International audience. We investigate the existence of acoustic Tamm states at the interface between two one-dimensional (1D) comblike phononic crystals (PnCs) based on slender tubes and discuss their topological o...

Chargement des enrichissements...