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Femtosecond laser micromachining of crystalline silicon for ablation of deep macro-sized cavities for silicon-on-insulator applications

Archive ouverte : Communication dans un congrès

Bhaskar, Arun | Philippe, Justine | Braud, Flavie | Okada, Etienne | Robillard, J.F. | Gloria, Daniel | Gaquière, Christophe | Dubois, Emmanuel

Edité par HAL CCSD ; SPIE

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